Figure 8. Temperature variation of the magnitude of E — EF.

where Nc (effective density of conduction band) is taken to be 5 x 1019 cm—3, and Nd is the donor concentration. From Eq. (3), the estimated values of Nd are plotted as a function of doping gas ratio, which are shown in Figure 9. Nd is almost linearly dependent on the doping gas ratio and this relationship deduced here is nearly the same as those obtained from the SIMS and the other measurements such as ESR by Finger et al. [8].


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