## D

Where, p is the density of the cantilever material and m is the effective mass of the cantilever. Note that m*=nmb, where mb is the mass of the cantilever beam and the value of n is either 0.14 for a 0.06 N/m V-shaped silicon nitride cantilever or 0.18 for a 0.03 N/m V-shaped silicon nitride cantilever or 0.24 for a rectangular cantilever. From Eq.13.7, it is obvious that changes in the mass and in the spring constant cause the resonance frequency to change. Therefore, the resonant frequency shift can be written as follows (Brath et al. 2002):

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