## F

Where, k is the spring constant and m is the effective mass of the cantilever. For a rectangular cantilever, the following equation expresses the spring constant for the vertical deflection as derived for a load at the end:

F Ewd3

h 4L

Where, F is the load applied at the end of the cantilever, h is the resulting end deflection, E is the modulus of elasticity for the cantilever material, and w, d, and L are the width, thickness, and length of the microcantilever beam, respectively. The fundamental frequency can be written as f =

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