Ml

Figure 4 Process sequence to prepare MIM capacitors. a, Al foil is anodically bonded to a glass substrate. b, AAO pore formation. c, MIM deposition via ALD processes. d, Electron-beam Al is deposited on top. e, Photolithography, masking and etching of the Al electrode, then the top electrode (TE) TiN, to define the capacitor area. f, Electrical testing using the Al foil (which is in contact with the bottom electrode TiN) as a back contact and electron-beam Al as the top contact. g, Two-inch...

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Was obtained for structures with an aspect ratio of 200 1. The line scan energy dispersive X-ray (EDX) analysis in Fig. 2b shows a typical composition profile of a nanotube. Viewed in transmission, a single nanotube normally shows two peaks in its composition profile15. These peaks correspond to the two sides of the nanotube inner diameter, indicating the points at which the electron beam passes through the thickest portion of the tube. In the case of MIM concentric nanotubes made here, there...

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287 An electric current spike linked to nanoscale plasticity Roman Nowak, Dariusz Chrobak, Shijo Nagao, David Vodnick, Michael Berg, Antti Tukiainen and Markus Pessa 292 Nanotubular metal-insulator-metal capacitor arrays for energy storage Parag Banerjee, Israel Perez, Laurent Henn-Lecordier, Sang Bok Lee and Gary W. Rubloff 297 Tunnelling readout of hydrogen-bonding-based recognition Shuai Chang, Jin He, Ashley Kibel, Myeong Lee, Otto Sankey, Peiming Zhang and Stuart Lindsay Qing-Zheng Yang,...

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