What are the Methods for Making Small Objects

The microelectronics process is able to make complex planar structures containing millions of working components in a square centimeter. This process is adaptable to making essentially planar mechanical machines with components on a micrometer scale.

An example of a turbine wheel is shown in Figure 3.7 [28]. This radial inflow turbine is made from silicon, using deep reactive ion etching. It is projected that a hydrocarbon burning gas turbine-electric generator under 1 cm3 in volume could be

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