In one of the first attempts to obtain the hardness of modified surfaces and coatings using depth and load-sensing indentation, Jonsson and Hogmark  developed a useful method for high applied loads based on the tip area function. Some progresses were described by Burnett and Rickerby  and Burnett and Page . But independent of all efforts, hardness measurements based on these models are only completely successful for thick layers (on the order of several micrometers) because substrate effects are present, and it is not so clear yet how they can be excluded from the hardness profiles [25-28].
Nowadays, technological advances to produce surface coatings (thin films) and new materials at nanometer scale play an important role in technological applications. The thickness in these situations is reduced to the order of a tenth of a micrometer or less, and consequently, nano-indentation practically is the unique technique indicated to obtain mechanical properties in these regions.
In the following, the principal results of the mechanical characterization of deposited coatings by nanoindentation methods are pointed out.
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