Glossary

Ab initio [Calculations] performed using only fundamental physical constants, that is, no experimental data or empirical numbers.

Atomic shadowing The effect that the surface morphology plays in the capture probability of incident atoms. Epitaxy/epitaxial growth Thin film growth where the crys-tallographic orientation of the grown layer aligns with that of the substrate.

Glancing angle deposition (GLAD) Exploits atomic shadowing effects to create layers with columnar structures.

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