Various gases, such as O2 [41], N2O [42], ozone [43], or a mixture of argon-oxygen atmosphere [26], result in oxygen-stoichiometric films. The background gas pressure is important for the oxidation process. Thus, the emission of the gas-phase oxidation of Mn during pulsed laser deposition of manganites in O2 and N2O atmospheres was studied. They show that oxidation both in the gas phase and at the surface is required in order to obtain the optimized properties. It was found that N2O increases the oxidation of Mn in the plasma plume, leading to an improvement of the magnetic properties of La0 67Sr033MnO3 [44].

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