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Note: PACVD, plasma-assisted chemical vapor deposition; UMS, unbalanced magnetron sputtering; MS, magnetron sputtering; GD, glow discharge; LTCVD, low-temperature chemical vapor deposition.

Source: Reprinted with permission from [175], G. M. Demyashev et al., in "Handbook of Organic-Inorganic Hybrid Materials and Nanocomposites" (H. S. Nalwa, Ed.), Vol. 2, Chap. 13. American Scientific Publishers, Stevenson Ranch, CA, 2003. © 2003, American Scientific Publishers.

Note: PACVD, plasma-assisted chemical vapor deposition; UMS, unbalanced magnetron sputtering; MS, magnetron sputtering; GD, glow discharge; LTCVD, low-temperature chemical vapor deposition.

Source: Reprinted with permission from [175], G. M. Demyashev et al., in "Handbook of Organic-Inorganic Hybrid Materials and Nanocomposites" (H. S. Nalwa, Ed.), Vol. 2, Chap. 13. American Scientific Publishers, Stevenson Ranch, CA, 2003. © 2003, American Scientific Publishers.

Table 4. Summary of some important physical-mechanical properties of superhard nanocomposites.
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